Sign In | Join Free | My ecer.co.uk |
|
Brand Name : KACISE
Model Number : KGD-MQ-536
Certification : CE
Place of Origin : CHINA
MOQ : 1PCS
Payment Terms : L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability : 1000 Piece/Pieces per Week negotiable
Delivery Time : 5-8 work days
Packaging Details : each unit has individual box and all boxes are packed in standard packages or customers requests available
Detection Principle : NDIR
Detected Gases : WF6, CF4, SF6, NF3, CO2
Measuring Range : 1 - 264ppm (0 - 200mTorr)
Repeatability : ±0.5%
Linearity : ±1%F.S.
Detection Limit : 1ppm
KGD - MQ - 536 Infrared Gas Sensor
Product Introduction
The KGD - MQ - 536 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as WF6, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, which helps reduce cleaning time, cut costs, and increase production.
Product Features
Technical Parameters
Parameter | Details |
Detection Principle | NDIR |
Detected Gases | WF6, CF4, SF6, NF3, CO2 |
Measuring Range | 1 - 264ppm (0 - 200mTorr) |
Repeatability | ±0.5% |
Linearity | ±1%F.S. |
Detection Limit | 1ppm |
![]() |
KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring Images |