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KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

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KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

Brand Name : KACISE

Model Number : KGD-MQ-536

Certification : CE

Place of Origin : CHINA

MOQ : 1PCS

Payment Terms : L/C, D/A, D/P, T/T, Western Union, MoneyGram

Supply Ability : 1000 Piece/Pieces per Week negotiable

Delivery Time : 5-8 work days

Packaging Details : each unit has individual box and all boxes are packed in standard packages or customers requests available

Detection Principle : NDIR

Detected Gases : WF6, CF4, SF6, NF3, CO2

Measuring Range : 1 - 264ppm (0 - 200mTorr)

Repeatability : ±0.5%

Linearity : ±1%F.S.

Detection Limit : 1ppm

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KGD - MQ - 536 Infrared Gas Sensor

Product Introduction

The KGD - MQ - 536 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as WF6, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, which helps reduce cleaning time, cut costs, and increase production.

KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

Product Features

  • Adopts NDIR technology, supports multi - gas monitoring (including WF6, CF4, SF6, NF3, CO2, etc.).
  • Fast response time and high sensitivity.
  • No consumables.
  • Analog/digital communication.
  • Modular design for easy integration.

Technical Parameters

Parameter Details
Detection Principle NDIR
Detected Gases WF6, CF4, SF6, NF3, CO2
Measuring Range 1 - 264ppm (0 - 200mTorr)
Repeatability ±0.5%
Linearity ±1%F.S.
Detection Limit 1ppm

Product Tags:

KGD Infrared Gas Leak Detector

      

Precise Monitoring Infrared Gas Sensor

      
Quality KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring for sale

KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring Images

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