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1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor

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1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor

Brand Name : KACISE

Model Number : KGD-MQ-537

Certification : CE

Place of Origin : CHINA

MOQ : 1PCS

Payment Terms : L/C, D/A, D/P, T/T, Western Union, MoneyGram

Supply Ability : 1000 Piece/Pieces per Week negotiable

Delivery Time : 5-8 work days

Packaging Details : each unit has individual box and all boxes are packed in standard packages or customers requests available

Detection Principle : NDIR

Detected Gases : SiF4, CF4, SF6, NF3, CO2

Measuring Range : 1 - 264ppm (0 - 200mTorr)

Repeatability : ±0.5%

Linearity : ±1%F.S.

Detection Limit : 1ppm

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KGD - MQ - 537 Infrared Gas Sensor

Product Introduction

The KGD - MQ - 537 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as SiF4, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, helping to reduce cleaning time, cut costs, and increase production.

1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor

Product Features

  • Utilizes NDIR technology, supports multi - gas monitoring (including SiF4, CF4, SF6, NF3, CO2, etc.).
  • Fast response time and high sensitivity.
  • No consumables.
  • Analog/digital communication.
  • Modular design for easy integration.

Technical Parameters

Parameter Details
Detection Principle NDIR
Detected Gases SiF4, CF4, SF6, NF3, CO2
Measuring Range 1 - 264ppm (0 - 200mTorr)
Repeatability ±0.5%
Linearity ±1%F.S.
Detection Limit 1ppm

Product Tags:

High Linearity Infrared Gas Sensor

      

0 200mTorr Infrared Gas Sensor

      

1 264ppm Infrared Gas Sensor

      
Quality 1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor for sale

1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor Images

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